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介绍了在半导体工业中有重要影响的氯硅烷之有关物理特性。包括电子级的多晶和单晶体硅。本资料中包括了硅的四氯、三氯、二氯和一氯衍生物的临界特性、蒸汽压、汽化热、热容量、比重、粘度、表面张力和热导率。包罗广泛的性质以简明图解和教科书版本示出,供研究、发展和制造工作之快速查用。
Describes the relevant physical properties of chlorosilanes that have a significant impact in the semiconductor industry. Including electronic grade polycrystalline and monocrystalline silicon. This information includes the critical properties of silicon tetrachloride, trichloride, dichloride and chloride derivatives of silicon, vapor pressure, heat of vaporization, heat capacity, specific gravity, viscosity, surface tension and thermal conductivity. The comprehensive nature of the study is illustrated in condensed graphic and textbook versions for quick reference to research, development and manufacturing.