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为改变我国现有真空镀膜设备及其控制技术的落后状况,以满足镀制复杂膜系、发展光学薄膜技术,西北光学仪器厂和五八研究所接受了上级下达的对东德B55-3-3旧镀膜机进行技术改造的任务。这项任务包括主机部分的改造、多坩埚磁偏转电子枪及镀膜参数控制系统的研制内容。镀膜参数控制系统由磁偏转电子枪扫描控制,SK蒸发速率自动控制、光学膜层厚度自动控制、真空压强自动控制、基片烘烤温度控制、高压灭弧复位自动控制、恒流源光源、光电倍增管高压电源等八部分组成。
In order to change the backward state of the existing vacuum coating equipment and its control technology in our country, in order to satisfy the plating complex film system and develop the optical film technology, the Northwest Optical Instrument Factory and the May-August Institute accepted the superiority of East German B55-3- 3 old coating machine for technical transformation tasks. This task includes the host part of the transformation, multi-crucible magnetic deflection electron gun and coating parameter control system development. The coating parameter control system is controlled by magnetic deflection electron gun scanning, SK evaporation rate automatic control, optical film thickness automatic control, vacuum pressure automatic control, substrate baking temperature control, high voltage arc extinguishing reset automatic control, constant current source light source, photomultiplier Tube high-voltage power supply composed of eight parts.