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目前,随着机械加工精度的提高,对几何尺寸的检测要求也越来越高,尤其对孔径的检测更为重要。近年来用电容测微仪测量微小位移取得了相当可喜的进展,充分发挥了灵敏度高、线性好、稳定、仪器简单、操作方便等优点。在电容测微仪用于孔径测量方面,由于孔壁是柱面,而且曲率半径因孔而异,因此测孔传感器的工作原理、结构计算以及使用方式都与测量平面位移时有着很多差异,故本文就测孔几种方案的设计与计算以及误差分析作如下介绍。一、测孔传感器的工作原理 1.平面传感器C_T平的计算测孔传感器是用φ3mm平面传感器按面
At present, with the improvement of machining accuracy, the requirements for the detection of geometrical dimensions are also getting higher and higher, especially the detection of the aperture is more important. In recent years, the use of capacitive micrometer to measure the tiny displacement has made quite encouraging progress, give full play to the high sensitivity, good linearity, stability, simple instrument, easy operation and so on. In the capacitance micrometer used for aperture measurement, the hole wall is cylindrical, and the radius of curvature varies with hole, so the working principle, structure calculation and use of the hole sensor have many differences with the measurement of plane displacement In this paper, the design and calculation of several programs of hole measurement and error analysis are as follows. First, the working principle of the hole sensor 1. Plane sensor C_T flat calculation Hole sensor is used φ3mm plane sensor according to the surface