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The fabrication and performance of optical waveguides by the in-diffusion of titaniuminto LiNbO_3 were investigated.We employ a closed-tube diffosion system and a methodto supply Li.The LiNbO_3 powder which has the same stoichiometry as the samplesubstrate and the Ti-sputtered LiNbO_3 wafer were placed in closed rectangular (77×23×21 mm~3) white alundum boat.For most of the experiments,fresh LiNbO_3 powder (0.5g)was used each time.Titanium films were deposited onto y-cut LiNbO_3 substrates by RFsputtering from a high-purity (99.99%) titanium.Under the diffusion conditions oftime (8hr) and temperature (1000℃),we have found that it is possible to obtain single-mode waveguides (at 6328 (?)),for Ti-films ranging in thickness between 192 and 460(?).The fabrication of waveguides is very simple and reproducible and it is possible both to
The fabrication and performance of optical waveguides by the in-diffusion of titaniuminto LiNbO_3 were investigated. We employ a closed-tube diffosion system and a method of supply Li. LiNbO_3 powder which has the same stoichiometry as the samplesubstrate and the Ti-sputtered LiNbO_3 wafer were placed in closed rectangular (77 × 23 × 21 mm ~ 3) white alundum boat. For most of the experiments, fresh LiNbO_3 powder (0.5g) was used each time. Titanium films were deposited onto y-cut LiNbO_3 substrates by RFsputtering from a high-purity (99.99%) titanium.Under the diffusion conditions of time (8hr) and temperature (1000 ° C), we have found that it is possible to obtain single-mode waveguides (at 6328 ranging in thickness between 192 and 460 (?). The fabrication of waveguides is very simple and reproducible and it is possible both to