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阐述了金刚石薄膜涂层的性能及应用前景．用微波等离子体化学气相沉积方法在Ｓｉ（１１１）以及ＳＤＡ１００３人造单晶金刚石的外露面上沉积出了优质金刚石薄膜层。
The performance and application prospect of diamond film coating are described. High-quality diamond films were deposited on the exposed surfaces of Si (111) and SDA1003 artificial single crystal diamonds by microwave plasma chemical vapor deposition.