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表面结构的测量与特征描述是精密计量技术的一个重要方面 ,传统上包括将轮廓情况根据不同的波长范围划分为粗糙度、波纹度和形状及后续的数字量化 .按算得的参数检查它是否为公差允许 ,以保证零件执行其指定的功能 .当技术特性已经经过仔细确定 ,并且其过程稳定时 ,该方法是令人满意的 ;但是 ,当制造过程正在进行中或过程的不稳定、过程变化使技术特性失效时 ,就需要研究和功能表现及过程评定相关的表面参数 .讨论了表面结构的分类与识别问题 .同时阐述了为此目的而开发的先进技术及其应用 .所研究的技术对从纳米尺度到传统的微米尺度的较大带宽范围内的表面特征描述都是有效的
The measurement and characterization of surface structures are an important aspect of precision metrology and have traditionally included the classification of the contour according to different wavelength ranges into roughness, waviness and shape, and subsequent digital quantification, checking whether it is Tolerances allow the part to perform its assigned function This method is satisfactory when the technical characteristics have been carefully determined and the process is stable; however, when the manufacturing process is in progress or the process is unstable, the process changes In order to invalidate the technical characteristics, it is necessary to study the surface parameters related to functional performance and process evaluation, discuss the classification and identification of surface structures, and describe the advanced technologies and their applications developed for this purpose. Surface characterization over a wide bandwidth from the nanoscale to the traditional microscale is valid