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线性运动在精密工程中被广泛应用。由于寄生运动的存在,要实现线性工作台或轴承完美无缺的直线运动几乎是不可能的。这些寄生运动包括:两个方向的平动(y和z),三个方向的转动,即滚动(Φ_x),垂直俯仰(Φ_y),水平晃动(Φ_z)。使用机械元件,这些寄生运动的数量级分别为1μm和1mrad。修改机械设计来增加直线运动的精度通常是困难的而
Linear motion is widely used in precision engineering. Due to the existence of parasitic movement, it is almost impossible to achieve a perfect linear motion of the linear table or bearing. These parasitic movements include translation in both directions (y and z), rotation in three directions, ie, roll (Φ_x), vertical pitch (Φ_y), and horizontal wobble (Φ_z). Using mechanical components, these parasitic motions are on the order of 1 μm and 1 mrad, respectively. It is usually difficult to modify the mechanical design to increase the accuracy of linear motion