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采用多弧离子镀技术在65Mn钢表面制备了不同调制周期的Cr/CrN纳米多层膜。采用俄歇能谱仪(AES)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米硬度仪、轮廓仪和划痕仪,分析了不同调制周期Cr/CrN纳米多层膜的成分分布、微观结构、力学性能、残余应力和结合强度。结果表明,Cr/CrN纳米多层膜的表面平整致密,截面层状调制结构清晰,其调制结构为Cr层-过渡层-CrN层的“三明治”结构,调制比约为1∶1。多层膜由CrN、Cr2N和Cr相组成,在CrN(200)方向上出现择优取向。当调制周期为80 nm时,多层膜的硬度值相对较高。随调制周期的增大,Cr/CrN多层膜的残余应力值减小,结合强度值先增大后减小。当调制周期为120 nm时,涂层的划痕临界载荷值相对较高,为69 N。
Multi-arc ion plating technology was used to prepare Cr / CrN nano-multilayer films with different modulation periods on the surface of 65Mn steel. The composition of Cr / CrN nano-multilayer films with different modulation periods was analyzed by Auger (AES), scanning electron microscopy (SEM), X-ray diffraction (XRD), nanohardness tester, profile analyzer and scratch tester. Distribution, microstructure, mechanical properties, residual stress and bonding strength. The results show that the surface of the Cr / CrN nanofilm is smooth and dense, and the structure of the cross-section lamellar structure is clear. The modulation structure of the Cr / CrN nanomultilayers is the “sandwich” structure of Cr layer - transition layer - CrN layer with a modulation ratio of about 1: 1. The multilayers consist of CrN, Cr2N and Cr phases with preferred orientation in the CrN (200) direction. When the modulation period is 80 nm, the hardness of the multilayer film is relatively high. With the increase of modulation period, the residual stress of Cr / CrN multilayers decreases and the bonding strength first increases and then decreases. When the modulation period is 120 nm, the critical scratch load of the coating is relatively high, 69 N.