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美国Permutit公司J.Castagna先生应上海市科技交流中心的邀请,于1984年4月13—14日和各有关单位进行了技术座谈。现将所谈内容摘要介绍如下: 一、超纯水水质指标的变迁在六十年代末到七十年代初,适应微电子工业的要求,电阻率18兆欧-厘米被认为是超纯水的水质指标而且有时是可以制出这样的不。可是,后来发现仅用这一项指标来衡量超纯水是不够的,有好些成份未包括进去。七十年代中微粒、细菌、二氧化硅,钠
Mr. J. Castagna of the Permutit Company of the United States conducted a technical discussion with the relevant units on April 13-14, 1984 at the invitation of the Shanghai Science and Technology Exchange Center. The summary of the discussion is as follows: 1. Changes in the ultra-pure water quality indicators In the late 1960s and early 1970s, to meet the requirements of the microelectronics industry, the resistivity of 18 megaohm-cm was considered to be ultrapure water. Water quality indicators and sometimes it can be made such a no. However, it was later found that using only this indicator to measure ultrapure water is not enough, and some of the ingredients are not included. Seventies, microparticles, bacteria, silica, sodium