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本文设计并制作了基于强限制多模干涉耦合器的2×2SOI马赫-曾德热光开关.这种光开关采用了深刻蚀结构的多模干涉耦合器和输入/输出波导,较大地提高了干涉耦合器的性能并减少了连接耦合损耗.同时,在调制臂区域采用浅刻蚀结构,保持其单模调制状态.深刻蚀多模干涉耦合器具有优越的特性,在实验中测得不均衡度只有0.03dB,插入损耗-0.6dB.基于这种耦合器的新型热光开关,其插入损耗为-6.8dB,其中包括光纤-波导耦合损耗-4.3dB,开关时间为6.8μs.
In this paper, a 2 × 2SOI Mach-Zehnder thermo-optic switch based on a strongly constrained multi-mode interference coupler has been designed and fabricated. This optical switch uses a deep-etched multimode interference coupler and an input / output waveguide, Interference coupler performance and reduce the connection coupling loss.At the same time, in the modulation arm area shallow etching structure, to maintain its single-mode modulation state.Heat etching multimode interference coupler has superior characteristics, measured in the experiment is not balanced With only 0.03 dB and insertion loss of -0.6 dB, the new thermo-optic switch based on this coupler has an insertion loss of -6.8 dB, including a fiber-to-waveguide coupling loss of -4.3 dB and a switching time of 6.8 μs.