论文部分内容阅读
采用新工艺、新技术对激光、氧化物晶体生长炉的提拉装置进行全新设计，并对其精度进行了综合分析。该提拉装置精度高、稳定性好，适合生长大直径晶体，满足大规模工业化生产的需求。
Adopting new technology and new technology, a new design of the lifting device of laser and oxide crystal growth furnace was carried out, and its accuracy was analyzed comprehensively. The pulling device with high precision and good stability, suitable for growing large diameter crystals, to meet the needs of large-scale industrial production.