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在固体表面分析方面,电子探针、质谱仪,离子探针、俄歇能谱仪等的使用,对科研、生产的发展起了很大的作用。但由于以上仪器结构复杂、辅助设备多、不仅设备耗资大,而且样品必须在真空(10~(-4)～10~(-7))室中进行分析,分析周期长。特别是一些非破坏性的分析样品和一些需要观察物理的或化学的变化过程的分析样品,就带来了一定的困难。为了满足近代科学技术发展的需要,最近日本理研计器研究部等单位共同开发出一种能在常温常压下测定低能电子的装置——低能电子分光仪就能解决上述分析中的一些困难。以下就该仪器的结构、原理、方法及分析对象等作一简要的介绍。
In solid surface analysis, the use of electron probe, mass spectrometer, ion probe, Auger spectrometer, etc., has played a significant role in the development of scientific research and production. However, due to the complexity of the above instruments and the large number of auxiliary equipment, not only is the equipment costly, but also the samples must be analyzed in a vacuum chamber (10 ~ (-4) ~ 10 ~ (-7)) and the analysis period is long. In particular, some non-destructive analysis of the sample and some need to observe the physical or chemical changes in the analysis of the sample, it brought some difficulties. In order to meet the needs of the development of modern science and technology, the research department of Japan’s R & D department recently developed a device that can measure low-energy electrons at room temperature and pressure - the low-energy electron spectrometer can solve some of the difficulties in the above analysis. The following on the instrument structure, principles, methods and analysis of objects such as a brief introduction.