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目前,国内外的激光打孔机,通常是用单片透镜使激光聚焦打孔的。这种最简单的光学系统打孔方法,有以下缺点:(1)孔的园整度取决于激光光斑的园整度;(2)孔的锥度与加工面的位置、激光能量和发散角关系极大,一旦参数发生微小变化,当激光通过短焦距的透镜打孔时,孔锥跟随发生相应变化;(3)打孔的飞溅物很容易沾污透镜保护玻璃片,这一点,有文献介绍用吹
At present, domestic and foreign laser drilling machine, usually with a single lens to focus laser drilling. This simplest optical system drilling method has the following disadvantages: (1) The hole center is determined by the circularity of the laser spot; (2) The taper of the hole is related to the position of the processing surface, laser energy and divergence Extremely large, once the parameters of small changes, when the laser through the short focal length lens hole, the cone follow the corresponding changes occur; (3) perforated splash is easy to stain lens protection glass, this point, there is literature With blowing