New method for thickness determination and microscopic imaging of graphene-like two-dimensional mate

• 作 者: 秦旭东 陈涌海 刘雨 朱来攀 李远 邬庆 黄威
• 机 构: Key Laboratory of Semiconductor Materials Science and Beijing Key Laboratory of Low Dimensional Semi
• 出 处: Journal of Semiconductors
• 发表日期: 2016年01期
• 关键词: microscopic concerned reflectance perfect topography arbitrary candidate charact

We employed the microscopic reflectance difference spectroscopy(micro-RDS) to determine the layernumber and microscopically image the surface topography of graphene and MoS_2 samples. The contrast image shows the efficiency and reliability of this new clipping technique. As a low-cost, quantifiable, no-contact and non-destructive method, it is not concerned with the characteristic signal of certain materials and can be applied to arbitrary substrates. Therefore it is a perfect candidate for characterizing the thickness of graphene-like twodimensional materials.

We employed the microscopic reflectance difference spectroscopy (micro-RDS) to determine the layer number and microscopically image the surface topography of graphene and MoS_2 samples. The contrast image shows the efficiency and reliability of this new clipping technique. As a low-cost, quantifiable, no-contact and non-destructive method, it is not concerned with the characteristic signal of certain materials and can be applied to arbitrary substrates. It is a perfect candidate for characterizing the thickness of graphene-like twodimensional materials.