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本文提出一种新型的光学探头的设计方法，该光学探头可以同时用来测量某一镜面反射表面某一点的离面位移和两个角度。本文同时采用了一个小功率激光器为光源，一种新型的ＣＭＯＳ图象传感器为光电传感器件。通过相关分析法和数据拟合等图象处理技术，提高了整套系统的精度和分辨率。一个较为明显的优点是位移和角度的测量是互不影响的。实验证实了该方法位移测量时具有精度为±１５微米，分辨率５微米；角度测量时具有精度±２５秒，分辨率１０秒。
In this paper, a new design method of optical probe is proposed. The optical probe can be used to measure the out-of-plane displacement and two angles at a certain point of a specular reflection surface at the same time. In this paper, a small power laser is used as a light source at the same time. A new type of CMOS image sensor is a photoelectric sensor. Through the relevant analysis and data fitting and other image processing techniques, improve the accuracy and resolution of the entire system. A more obvious advantage is that displacement and angle measurements do not affect each other. Experiments show that this method has a resolution of ± 15 μm and a resolution of 5 μm for displacement measurement. The accuracy of angle measurement is ± 25 seconds with a resolution of 10 seconds.