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采用适当的掩模和AZ1350H抗蚀剂,用光刻接触曝光的方法已做出具有4000埃线宽的指状电极的表面声波换能器。曝光时间可在三倍范围变化,这表明:由于衍射引起的线条变宽是受光的非线性或光致抗蚀剂的曝光显影特性或两者兼而有之的影响。
Using a suitable mask and AZ1350H resist, a surface acoustic wave transducer having a finger electrode of 4000 angstroms in line width has been made by lithographic contact exposure. The exposure time may vary by a factor of three, indicating that line broadening due to diffraction is affected by the non-linearity of the light exposure or the exposure development characteristics of the photoresist or both.