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一、引言随着数字计算机在国防和国民经济各个领域日益广泛的应用。对模/数转换装置在精度、速度、灵敏度、抗干扰、维护使用简便性、经济性以及工作环境条件等方面都提出了值得研究的新课题。转换器又作为多种数字设备的重要部件在数字仪表工业中得到了迅速发展。自六十年代以来,积分式模/数转换技术由于其具有理想的抗干扰性,并能在转换精度方面亦有相应提高而受到普遍重视,不断有新产品出现。然而,在实现积分方案全部线路组件化的研制任务中,所面临的首要问题却是工艺生产技术方面的困难。特别对宽温度范围(温差100℃以上)条件下要求保证高精度指标的情况,工艺实现的现实性和难易程度则成为问题的关键。
I. INTRODUCTION With the increasing use of digital computers in various fields of national defense and national economy. The A / D converter has proposed a new topic to be studied in terms of accuracy, speed, sensitivity, interference resistance, ease of maintenance and use, economy and working conditions. Converters, in turn, have gained rapid growth in the digital instrumentation industry as an important part of many digital devices. Since the 1960s, the integrated A / D conversion technology has received widespread attention because of its ideal immunity to interference and its corresponding improvement in conversion accuracy. New products are constantly emerging. However, the primary problem faced in the development of the entire line assembly of the integration scheme is the technical difficulties of the production process. Especially for a wide temperature range (temperature difference of 100 ℃ or more) under the conditions required to ensure high-precision indicators, the reality of the process and the difficulty of the realization of the key issues.