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本文提出了一种采用迈克尔逊干涉仪方法测量压电振子表面振动位移分布的简单方法。当其中一支光路引入一低频相位调制,可使测量结果不受环境机械振动和声噪声的干扰(包括带动微动台移动的马达机械振动和声噪声),因而可进行一维自动测量。当自动测量时,位移振幅一般需大于0.1A,当进行定点精密绝对测量时,最小可测位移为5×10~(-2)-5×10~(-3)A,最后给出了几种压电振子的测量结果。
This paper presents a simple method using the Michelson interferometer method to measure the surface vibration displacement distribution of a piezoelectric vibrator. When one of the optical paths introduces a low-frequency phase modulation, measurement results are not disturbed by ambient mechanical vibrations and acoustic noises, including mechanical vibration and acoustic noise of the motor that drives the fretting stage, enabling one-dimensional automatic measurements. When the automatic measurement, the displacement amplitude is generally required to be greater than 0.1A, when the precise measurement of fixed-point precision measurement, the minimum measurable displacement of 5 × 10 -2 -5 × 10 -3 A, finally gives a few Piezoelectric vibrator measurement results.