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通过对亚纳米级超精细表面微观形貌光电测量技术发展现状的介绍，着重阐述了激光差动干涉到同轴式激光表面微观测量的原理，对四种典型同轴式激光轮廓仪的特点以及影响表面微观形貌测量精度和限制测量分辨率的因素进行了分析，介绍了作者关于同轴式激光轮廓仪运用到超精加工金刚石车床上进行纳米级微观形貌在线检测的研究成果。
By introducing the development status of sub-nanometer ultra-fine surface micro-morphology photoelectric measurement technology, the principle of laser differential interference to the coaxial laser surface micro-measurement is emphatically described. The characteristics of four typical coaxial laser profilers, The influencing factors of measuring the surface micro-topography and limiting the measurement resolution were analyzed. The author also introduced the research results on the on-line detection of nano-scale micro-morphology of the super-finished diamond lathe by coaxial laser profiler.