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微波（２４５ＧＨｚ）使放电管（φ３２ｍｍ）产生等离子体，在其同直径渗氮管下游区活性原子浓度高、寿命长［１］，处理金属材料无尺寸和位置限制，４５、２０钢渗氮后微观分析发现，其表面没有化合物白层（ε、γ、γ’相），Ｘ射线衍射（ＸＰＤ）分析，仅存在αＦｅ相结构，Ｘ射线光电子谱（ＸＰＳ）分析材料表面有Ｎ元素。测出渗氮试样比未渗氮试样的显微硬度高８０％。其原因为αＦｅ峰值位移变化，材料晶格参数改变，表面氮扩散层引起显微硬度提高。
Microwave (245GHz) makes the discharge tube (φ32mm) to generate plasma. The active atom concentration in the downstream area of the same diameter nitriding tube has long service life [1], no restriction on the size and position of the treated metal material, Nitrogen microscopic analysis showed that there was no compound white layer (ε, γ, γ ’phase) and X-ray diffraction (XPD) analysis on the surface and only α-Fe phase structure. X-ray photoelectron spectroscopy (XPS) element. The microhardness of nitriding samples was measured by 80% higher than that of non-nitriding samples. The reason for the α-Fe peak displacement changes, the material lattice parameters change, the surface of the nitrogen diffusion layer caused by increased microhardness.