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本文论述了一种新颖的集成磁敏传感器。它是以互补三漏MOS晶体管为磁敏器件,采用半导体集成电路技术,将放大电路,偏置电路与磁敏元件集成在同一芯片上。该传感器具有灵敏度高、功耗低和体积小等特点。本文详细地分析了传感器的磁敏原理和电路结构,并对传感器的磁敏特性进行了测量和讨论。实验结果基本符合理论设计。
This article discusses a novel integrated magnetic sensor. It is a complementary three-drain MOS transistor as a magnetic sensor, the use of semiconductor integrated circuit technology, the amplifier circuit, bias circuit and magnetic sensors integrated in the same chip. The sensor has high sensitivity, low power consumption and small size. In this paper, the principle of magnetic susceptibility and the circuit structure of the sensor are analyzed in detail, and the magnetic susceptibility of the sensor is measured and discussed. The experimental results are basically in line with the theoretical design.