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本文对提高圆光栅、圆磁栅比相式测量仪测量精度的多测头法,作了新的简明的数学分析,导出了消除附加误差的若干基本关系式。进而得出两条重要结论:(1)调相信号的叠加会出现不希望有的调幅影响,带来幅相误差;(2)圆分度元件允许的最大安装偏心量为e_m<λ/4。本文还对降低幅相误差很有意义的双极性触发式相位计作了必要分析。此外提出在相位计的放大通道中要慎用相敏网络,以减小频相误差。
In this paper, a new concise mathematical analysis is made on the multi-probe method to improve the measurement accuracy of the circular grating and circular magnetic grid ratio phase meter, and some basic relations to eliminate the additional error are derived. And then come to two important conclusions: (1) the phase modulation signal superimposed will appear unwanted AM effects, bringing amplitude and phase error; (2) circular indexing device allows the maximum installation eccentricity e_m <λ / 4 . This article also made necessary analysis on the bipolar triggering phase meter which is very meaningful to reduce the amplitude and phase error. In addition, it is suggested that phase sensitive network should be used with caution to reduce phase error.