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利用热蒸发Zn粉的方法,在Au/掺铝氧化锌(AZO)/石英衬底上生长ZnO纳米结构。为了研究不同温度退火后的衬底对生长的ZnO纳米结构的影响,Au/AZO/石英衬底在生长纳米结构前分别在300、500和700℃真空下退火。Au/AZO/石英衬底的表面形貌用原子力显微镜(AFM)观测。ZnO纳米结构的微结构、形貌和光学性能分别用X射线衍射(XRD)、扫描电子显微镜(SEM)、透射电子显微镜(TEM)和荧光光谱仪进行测量。结果表明,在未退火和300℃退火衬底上生长了大量的ZnO纳米棒,而在500℃和700℃退火衬底上沉积了大量ZnO纳米颗粒。单晶结构的纳米棒的平均直径分别约50nm和80nm,其生长机制为蒸气-液体-固体(VLS)生长机制。荧光光谱显示所有的样品都存在紫外发光峰和深能级发射带,随着退火温度的升高,生长的纳米结构的紫外发光峰相对强度增强,而深能级发射强度减弱。
ZnO nanostructures were grown on Au / Al-doped zinc oxide (AZO) / quartz substrates by thermal evaporation of Zn powders. In order to study the effect of substrates annealed at different temperatures on the growth of ZnO nanostructures, the Au / AZO / quartz substrates were annealed at 300, 500 and 700 ° C under vacuum, respectively, before growing the nanostructures. The surface morphology of the Au / AZO / quartz substrate was observed with an atomic force microscope (AFM). The microstructure, morphology and optical properties of ZnO nanostructures were measured by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and fluorescence spectroscopy, respectively. The results show that a large amount of ZnO nanorods are grown on the unannealed and 300 ℃ annealed substrates while a large amount of ZnO nanoparticles are deposited on the annealed substrates at 500 ℃ and 700 ℃. The average diameter of the single crystal nanorods is about 50 nm and 80 nm, respectively. The growth mechanism of the nanorods is vapor-liquid-solid (VLS) growth mechanism. Fluorescence spectra showed that all the samples had UV emission bands and deep level emission bands. With the increase of annealing temperature, the relative intensities of the UV emission peaks of the grown nanostructures increased while the emission intensities of the deep levels decreased.