Sensitive detection of infrared photons using a high-Q microcantilever

• 作 者: 张逢新 朱银芳 杨晋玲 曹立新
• 机 构: Research Center of Engineering for Semiconductor Integrated Technology,Institute of Semiconductors,C
• 出 处: 半导体学报
• 发表日期: 2011年09期
• 关键词: cantilever vibrating Infrared modulated distributing sinusoidal pulsed nitride p

A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force.The irradiating light is modulated into sinusoidal and pulsed waves,and to be in-phase and anti-phase with the cantilever driving signal.A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed.Under a vacuum of 10~(-4) Pa,an infrared light power of 7.4 nW was detected with the cantilever.The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.

A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force. The irradiating light is modulated into sinusoidal and pulsed waves, and to be in- phase and anti-phase with the cantilever driving signal. A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed. Bunder a vacuum of 10 -4 Pa, an infrared light power of 7.4 nW was detected with the cantilever. in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.