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基于MEMS加工技术的电液动力微泵在微流体冷却系统和解决高热流器件的冷却问题中占有重要地位。电液动力微泵的核心部分是通过MEMS加工工艺制作的由成对的发射极和集电极组成的微电极。在电极对间的强电场作用下,电介质流体中的离子、极子以及微粒同电场相互作用来驱动流体流动。本文系统地讨论了微电极在设计和制作中需要关注的问题:电极材料的选择方针,多种形状的电极设计和两种电极加工工艺—电镀法和剥离法的对比。实验结果表明:贵金属有更好的抗电化腐蚀能力;同普通平行电极结构相比,带有尖锐结构的电极更能提高微泵的性能;相比电镀法,剥离法能更好地提高电极的制作质量。
Electrohydrodynamic micropumps based on MEMS machining technology play an important role in the microfluidic cooling system and in solving the problem of cooling high heat flow devices. The core part of the electro-hydraulic micropump is a microelectrode made of pairs of emitters and collectors made by MEMS processing. Under the action of a strong electric field between the electrode pairs, the ions, the poles and the particles in the dielectric fluid interact with the electric field to drive the fluid flow. This article systematically discusses the microelectrodes in the design and production of the need to pay attention to the issue: the electrode material selection guidelines, a variety of shapes of electrode design and two kinds of electrode processing technology - electroplating and peeling comparison. The experimental results show that the noble metal has better resistance to electrochemical corrosion. Compared with the common parallel electrode structure, the electrode with the sharp structure can improve the performance of the micro pump more. Compared with the electroplating method, the lift-off method can better improve the performance of the electrode Production quality.