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基于斜入射薄膜制备实践中镀膜误差对光谱性能的严重退化影响的认识,提出了一种基于灵敏度控制思想的主动膜系设计方法。在深入分析了镀膜中膜层结构参数误差的分布规律的基础上,运用膜系光谱系数关于膜层参数的导数计算的解析模型,建立了膜系灵敏度的定量计算模型和快速实现算法。以一45°入射高精度消偏振增透膜的设计实验为例,探讨了灵敏度控制思想在膜系设计中的可行性、快速性和有效性。结果表明,这一新型设计方法不会显著增加程序时间消耗,能获得具有良好可镀制性能的薄膜,对于正入射和宽角度入射膜同样适用,而且可以避免昂贵的失败试镀和采样,有助于缩短新薄膜的生产周期,特别是对于高精度斜入射薄膜的重复性制备具有重要意义。
Based on the understanding of the serious degradations of the spectral properties caused by coating errors in the preparation of oblique incident films, a method of active film lines design based on the idea of sensitivity control is proposed. Based on the in-depth analysis of the distribution law of the parameters of film structure in coating, the quantitative model of membrane sensitivity and the fast algorithm are established by using the analytic model of spectral coefficient of membrane based on the derivative calculation of membrane parameters. Taking a 45 ° incident high-precision depolarization AR coating as an example, the feasibility, speediness and effectiveness of sensitivity control in membrane system design are discussed. The results show that this new design approach does not significantly increase program time consumption and results in a film with good platability that is equally applicable for both normal incidence and wide angle incident films and avoids expensive failed plating and sampling Help to shorten the production cycle of the new film, especially for the repetitive preparation of high-precision oblique incident film is of great significance.