【摘 要】
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本文试图对半导体陶瓷气敏元件的敏感机理提出理论模型。假定吸附表面态由吸附的氧离子构成,则在吸附还原气体时,将伴随着向体内发射自由电子。运用统计热力学的一般方法给出
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本文试图对半导体陶瓷气敏元件的敏感机理提出理论模型。假定吸附表面态由吸附的氧离子构成,则在吸附还原气体时,将伴随着向体内发射自由电子。运用统计热力学的一般方法给出电导率随气体浓度、加热温度以及材料参数变化的解析表达式,从而得到灵敏度与加热温度、气体浓度和材料参数的定量关系,所得结果与实验结果基本符合。
This paper attempts to propose a theoretical model for the sensitive mechanism of semiconductor ceramic gas sensors. Assuming that the adsorption surface state is composed of adsorbed oxygen ions, free electrons are emitted into the body upon adsorption of the reducing gas. By using the general method of statistical thermodynamics, the analytical expressions of the conductivity with the gas concentration, the heating temperature and the material parameters are given. The quantitative relationship between the sensitivity and heating temperature, gas concentration and material parameters is obtained. The results are in good agreement with the experimental results.
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