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目前,用带有电子枪的镀膜机制造光学薄膜器件已得到广泛的应用,这是因为电流加热法所获得的温度受到蒸发源许多条件的限制,而且也很难避免蒸发源材料对蒸镀物质的污染,所以在使用蒸发熔点较高或性质较活泼的材料时,常用电子束加热,但是在使用电子束加热时会产生放射性辐射,在使用电子枪一段时间后,操作人员感到十分疲劳,白血球明显降低。因此,广大镀膜工作者对这一问题十分关心与重视,有必要把镀膜机所产生的射线情况、剂量大小、防护措施等问题搞清楚。为此本文力求在理论与实
At present, the manufacture of optical thin film devices using a coating machine with an electron gun has been widely used because the temperature obtained by the current heating method is limited by many conditions of the evaporation source, and it is also difficult to prevent the evaporation source material from affecting the deposition material Pollution, so the use of evaporation melting point higher or more active material, the use of electron beam heating, but in the use of electron beam heating will produce radioactive radiation, the use of electron guns for a period of time, the operator felt very tired, significantly reduced white blood cells . Therefore, the majority of coating workers are very concerned about this issue and attention, it is necessary to coating machine generated ray conditions, dose size, protective measures and other issues clear. To this end, this article seeks to theory and reality