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氢离子敏场效应晶体管(HISFET)是一种新型的微型半导体敏感器件,其结构与金属—绝缘体—半导体场效应晶体管(MISFET)基本相同。HISFET用途广泛,具有许多比传统的玻璃电极优越的特性。本文论述了以Si_3N_4/SiO_2作为栅绝缘膜的HISFET的设计、制造和参数测试方法。初步讨论了其敏感机理。HISFET曾试用在医学上血液的PH值和工业废液的PH值的测试上。利用HISFET测得的数据同传统玻璃电极测得的数据是一致的。HISFET是一种很有发展前途的离子选择电极。
HISFET is a new type of micro-semiconductor sensor with the same structure as MISFET. HISFETs are versatile and have many of the characteristics that are superior to traditional glass electrodes. This article discusses the design, fabrication, and parameter testing of HISFETs using Si_3N_4 / SiO_2 as a gate insulator. Preliminary discussion of its sensitive mechanism. HISFET has been tested on medical blood PH and industrial waste PH value of the test. The data measured with HISFET are consistent with the data measured with conventional glass electrodes. HISFET is a very promising ion-selective electrode.