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利用等离子体聚合技术制备的GDP壳层是目前ICF靶丸的主要烧蚀层材料。为了了解GDP薄膜沉积过程中的CH等离子体的状态,采用朗缪尔探针和质谱仪对C4H8/H2等离子体的组分和状态参数进行了诊断,并对等离子体的电子能量分布函数、电子密度、电子温度等进行了深入分析。同时讨论了等离子体状态与放电参数之间的关系。研究发现,射频功率对等离子体参数有明显的影响。从10W到35W,电子密度正比于射频功率。随着射频功率的增加,在两步电离机制作用下,电子温度和等离子体电势呈现先减小后增大的变化趋势。另外,在高气压下,质谱诊断中发现了大量的稳定的小质量碎片离子,这表明在高气压下等离子体气相中的离子碎片聚合反应被抑制。
The GDP shell prepared by plasma polymerization is the main ablator material for ICF pellets. In order to understand the state of CH plasma during the deposition of GDP film, the composition and state parameters of C4H8 / H2 plasma were diagnosed by Langmuir probe and mass spectrometer. The electron energy distribution function of plasma, electron Density, electronic temperature and other in-depth analysis. The relationship between the plasma state and the discharge parameters is also discussed. The study found that RF power has a significant effect on the plasma parameters. From 10W to 35W, the electron density is proportional to the RF power. With the increase of RF power, under the action of two-step ionization mechanism, the electron temperature and the plasma potential decrease first and then increase. In addition, a large number of stable, small mass fragment ions were found in MS diagnosis at high pressure, indicating that polymerization of ionic fragments in the plasma gas phase was inhibited at high pressures.