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由河北省科委下达,我院承担的“FA/O—8003系列抛光液的研究”于1989年7月23日在我院通过省级技术鉴定.该项目是硅器件与外延材料关系研究项目的子课题.是在1982年 FND—MOS 型8001—8002抛光液获国家发明奖基础上继续开展的无磨料抛光研究.以我院获国家级突出贡献奖的刘玉岭副教授为组长的半导体技术研究室抛光液研究组经过七年多的试验研
According to the “FA / O-8003 Series Polishing Fluid Research” undertaken by Hebei Science and Technology Commission, our institute passed the provincial technical appraisal in our hospital on July 23, 1989. This project is a research project on the relationship between silicon devices and epitaxial materials Is a non-abrasive polishing research carried out on the basis of the National Invention Award of FND-MOS type 8001-8002 polishing liquid in 1982. Based on the semiconductor technology research led by Associate Professor Liu Yuling who won the national outstanding contribution award in our hospital, Room polishing liquid research group after more than seven years of experimental research