论文部分内容阅读
报道了用无水SnCl4和SnCl4·5H2O为原料,用热喷涂法制备SnO2薄膜,在基片温度为530℃时,制得薄膜的X-射线,SEM图及其光电性质.总结出含H2O的SnCl4制得的薄膜生长速度快,电阻率低,两者在结构上无明显差异。
The SnO2 thin films were prepared by thermal spray method using anhydrous SnCl4 and SnCl4 · 5H2O as raw materials. The X-ray and SEM images of the thin films were obtained at 530 ℃. It is concluded that SnCl4 containing H2O has a fast growth rate and a low resistivity, and there is no obvious difference in structure between the two.