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电感电容(LC)谐振式压力传感器可以通过电感耦合实现无线测量,使得它可以应用于诸如高温、密封等不适合引线的环境中,具有广泛的应用前景。本文设计了一种LC谐振式压力传感器。该结构由一个可变电容与一个平面电感线圈并联形成LC谐振子,通过无线测量谐振频率的改变表征检测压力的大小。。基于硅微湿法腐蚀、电铸、阳极键合等微机电系统(MEMS)工艺制备了敏感元件,并测试了压力敏感特性。由ANSYS仿真得到该传感器在0~100k Pa压力范围内电容值在15~23 p F内变化,加工后敏感元件尺寸为8 mm×8 mm×1 mm,传感器灵敏度为0.0441 MHz/k Pa,线性误差为2.23%。
Inductive Capacitance (LC) Resonant pressure transducers enable wireless measurement via inductive coupling, making them suitable for use in environments that are not suitable for leads, such as high temperatures, seals, etc., and have a wide range of applications. This paper designed a LC resonant pressure sensor. The structure consists of a variable capacitor in parallel with a planar inductive coil to form an LC resonator, which measures the magnitude of the detected pressure by wirelessly measuring changes in resonant frequency. . The sensitive components were prepared based on micro-wet etching of silicon, electroforming, anodic bonding and other micro-electromechanical system (MEMS) processes, and the pressure-sensitive characteristics were tested. The ANSYS simulation results showed that the capacitance of the sensor varied from 15 to 23 pF in the pressure range of 0 ~ 100k Pa. The sensor size after processing was 8 mm × 8 mm × 1 mm. The sensitivity of the sensor was 0.0441 MHz / kPa. The linearity The error is 2.23%.