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研究了稀土钇不同含量时对离子镀ＴｉＮ膜层与基体结合力的影响．用扫描电镜，俄歇谱仪，Ｘ射线衍射等手段，对加入稀土钇的ＴｉＮ膜层作了分析。结果表明，加适量稀土钇后，ＴｉＮ膜层与基体的结合力大大提高。其微观机制是，加稀土钇后，膜层相组成发生变化，在膜－基之间形成一过渡层，塑性相（Ｔｉ相）增加，脆性相（Ｔｉ２Ｎ）减少，从而减小了膜－基界面间的应力。此外，结果还表明，稀土钇能明显提高镀膜过程中钛料蒸发率，使成膜速率增加，在相同镀膜时间内ＴｉＮ膜层加厚。
The effect of different content of rare earth yttrium on the bond strength between TiN film and substrate was studied. By means of scanning electron microscopy, Auger spectroscopy, X-ray diffraction and other means, the addition of rare earth yttrium TiN film was analyzed. The results show that the addition of appropriate amount of rare earth yttrium, TiN film and substrate greatly enhance the binding strength. The microscopic mechanism is that with the addition of rare earth yttrium, the phase composition of the coating changes, a transition layer forms between the film and the base, the plastic phase (Ti phase) increases and the brittle phase (Ti2N) decreases, Interface between the stress. In addition, the results also show that rare earth yttrium can significantly improve the evaporation rate of titanium coating process, the film rate increases, the same coating time TiN film thickening.