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本文简介了Pd栅MOS气敏传感器的敏感机理.以N阱双极/MOS兼容工艺,将传感器的CO或H_2气敏单元、气敏补偿单元、加热电阻、温敏单元单片集成,制作了可调高温的具有高稳定输出的芯片自恒温系统.测试结果表明,该气敏传感器具有良好的选择性、稳定性和校高的灵敏度.
In this paper, the sensitive mechanism of Pd gate MOS gas sensor is briefly introduced.With the N-well bipolar / MOS compatible process, the CO or H 2 gas sensor, gas sensor, gas sensor, heater resistor and temperature sensor are monolithically integrated Temperature-stable chip with high stable output from the constant temperature system.The test results show that the gas sensor has good selectivity, stability and high sensitivity.