论文部分内容阅读
日本产业技术综合研究所开发出了基于MEMS(微电子机械系统)技术的静电传感器,并在“日本NanoMicroBusiness展”(东京有明国际会展中心,7月5日闭幕)上进行了展示。传感器部分安装有借助悬臂悬浮的微小电极。带静电荷的物体靠近传感器后,微小电极的电位就会发生变化,根据这一变化就能测出静电容量。试制的传感器部分的尺寸约为数mm见方,可轻松实现阵列化。使用实现了阵列化的传感器,还能测量静电的表面分布。
Japan’s National Institute of Advanced Industrial Science and Technology has developed an electrostatic sensor based on MEMS (Micro Electro Mechanical Systems) technology and presented it at the Japan NanoMicroBusiness Show (Tokyo Big Sight International Convention Center, closing on July 5). The sensor section is equipped with tiny electrodes suspended by a cantilever. Electrostatic charges close to the sensor object, the microelectrode potential will change, based on this change can be measured capacitance. Prototype part of the sensor size of about several mm square, can be easily array. Using an array-enabled sensor, it is also possible to measure the surface distribution of static electricity.