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自从激光器问世以来,特别是近几年稳频激光器付之实用后,干涉精密测量取得了重大的进展。目前,激光干涉系统已广泛应用于长度、角度、直线度、平行度、平面度、两轴正交性、光洁度等几何量的精密测量,机械加工中工件尺寸的控制和切削参数的测量,精密机床、坐标测量机的校正,集成电路制作中的精密定位,以及振动、速度、加速度、重力、压力、材料线膨胀系数等物理量的精密测定。本文叙述几种新的高精度激光长度测量干涉仪,这些干涉系统当然也可以应用于其它精密测量领域。
Since the advent of lasers, especially in recent years, the frequency stabilized lasers to pay for practical, precision interferometry has made significant progress. At present, the laser interferometry system has been widely used in precision measurement of geometric quantities such as length, angle, straightness, parallelism, flatness, orthogonality of two axes, finish and so on, workpiece size control and cutting parameter measurement in machining, Machine tools, coordinate measuring machine calibration, integrated circuit manufacturing precision positioning, and vibration, velocity, acceleration, gravity, pressure, material linear expansion coefficient of precision measurement. This article describes several new high accuracy laser length measurement interferometers that can of course be used in other precision measurement applications.