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为实现DB—5型电子束曝光机工件台高速度及高精度的要求,研制了x向闭式静压气浮导轨,该系统由双导轨及单导轨两部分组成。本文主要介绍静压气浮导轨系统的设计计算、性能试验。
In order to realize the requirement of high speed and high precision of workpiece table of DB-5 electron beam exposure machine, the x-direction closed-type hydrostatic flotation guide rail is developed. The system consists of double guide rail and single guide rail. This article mainly introduces the design calculation and performance test of static pressure air floating guide rail system.