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Mo suicides Mo5 Si3 with high quality were prepared using ion beam deposition equipment with two Filter Metal Vacuum Arc Deposition (FMEVAD). When the number of alternant deposition times was 198, total thickness of the coating is 40nm. The coatings with droplet free can be readily obtained, so the surface is smooth. TEM observation shows that Mo and Si alternant deposition coating is compact structure. The fine Mo suicide grains densely distributed in the coating. The coating adherence on silicon is excellent.
Mo suicides Mo5 Si3 with high quality were prepared using ion beam deposition equipment with two Filter Metal Vacuum Arc Deposition (FMEVAD). When the number of alternant deposition times was 198, the total thickness of the coating is 40 nm. The coatings with droplet free can be The fine Mo suicide grains densely distributed in the coating. The coating adherence on silicon is excellent.