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电视硅片图形缺陷和掩膜版缺陷检查仪 1.电视硅片图形缺陷检查仪主要用于大规模集成电路生产流水线中检查硅片每道光刻的图形质量。仪器采用光电自动调焦,能实现五点法自动检查。 2.掩膜版缺陷检查仪主要用于检查大规模集成电路掩膜版的缺陷情况。利用空间滤波原理,图象信息处理技术结合光电轮廓自动调焦技术来检查掩膜版的缺陷,在国内属首创。
TV graphics silicon defects and mask defects tester 1. TV graphics chip defects tester is mainly used for large-scale integrated circuit production line check each wafer lithography graphics quality. The instrument uses photoelectric auto-focus, can achieve five-point method automatically check. 2. Mask version defect tester is mainly used to check the defects of large-scale integrated circuit mask version. The use of spatial filtering theory, image information processing technology combined with photoelectric contouring auto-focus technology to check the mask version of the defect, is the first in China.