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本文报道我们用锂离子注入方法在熔融石英玻璃衬底上制备的低损耗单模光波导的实验结果.注入离子的能量和剂量分别是130KeV和1×10~(15)离子/cm~2。用抛物线分布,由模有效折射率确定了离子注入波导的参数.锂离子注入石英玻璃光波导的最大折
In this paper, we report the experimental results of a low loss single mode optical waveguide fabricated on a fused silica glass substrate by a lithium ion implantation method with energy and dose of 130 KeV and 1 × 10 15 ions / cm 2, respectively. With the parabola distribution, the parameters of the ion-implanted waveguide are determined by the effective refractive index of the die. The maximum fold of lithium-ion implanted quartz glass optical waveguide