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本文研究了多级位相光栅的设计原理，给出了几组不同阵列数的多级位相光栅的设计参数。结果表明所设计的光栅各级衍射光强均匀分布且具有较高的衍射效率。
In this paper, the design principle of multi-level phase grating is studied and the design parameters of several groups of multi-phase phase grating with different array number are given. The results show that the designed diffraction grating has uniform diffraction intensity and high diffraction efficiency.