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本文用磁控溅射法制备的纯Ｆｅ 膜，再在Ｓ气氛中（８０ｋＰａ）于不同的温度下（２００～６００℃）进行热硫化，硫化时间为１０ｈ，使其转变成为ＦｅＳ２薄膜，并研究了硫化温度对转变形成的ＦｅＳ２薄膜晶体结构、化学成分、组织形貌和光电性能的影响规律。
In this paper, the pure Fe film prepared by magnetron sputtering was heat vulcanized at different temperature (200 ~ 600 ℃) in S atmosphere (80kPa) for a duration of 10h to transform into FeS2 thin film The effects of curing temperature on the crystal structure, chemical composition, morphology and optical properties of FeS2 thin films were investigated.