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电解加工在加工过程中因难以控制加工形状而很少应用在微细加工领域.为了对微细电解加工可行性进行探索,设计了多功能微细加工平台.利用多功能微细加工平台可为微细电解加工在线制作电极,采用低加工电压、低浓度的钝化电解液、高频窄脉冲电源和高速旋转的微细电极,进行了微细电解加工实验,取得了很好的工艺效果.加工间隙是影响加工精度的关键因素,设计了一个加工间隙控制伺服系统,以保证微小的加工间隙.在厚为100μm的不锈钢薄片上用微细电解打孔加工出直径为65μm的微小孔.利用微细电解加工时电极无损耗,提出采用简单圆柱微细电极进行微细电解铣削,加工出较高精度的微结构,取得了较好的工艺效果,从而验证了该微细电解加工装置的微细加工能力和方法的可行性.
Electrolytic machining is rarely used in the field of micromachining due to the difficulty in controlling the machining shape during the machining process. In order to explore the feasibility of micro-electrolysis machining, a multi-functional micromachining platform has been designed. The multi-functional micromachining platform can be used for micro- The electrode was fabricated and the micro-electrolysis machining experiment was carried out with low processing voltage, low concentration passivation electrolyte, high-frequency narrow pulse power supply and high-speed rotating microelectrode, and the good process result was obtained. The key factor is to design a machining gap control servo system to ensure the tiny machining gap.The tiny holes with the diameter of 65μm are machined by fine electrolysis on the stainless steel sheet with a thickness of 100μm.The electrodes are not damaged when using the micro- A simple cylindrical microelectrode was proposed for micro-electrolytic milling to fabricate high-precision micro-structure and achieved good technological results. The micro-fabrication capability and feasibility of the micro-electrolysis processing apparatus were verified.