溶胶凝胶法制备多孔SiO_2减反射膜结构和性能研究

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以TEOS(硅酸乙酯)、MTES(甲基三乙氧基硅烷)作为前驱体,MTES(甲基三乙氧基硅烷)为有机改性剂,Triton~?X-100作为模板剂,由酸催化溶胶-凝胶工艺制备多孔二氧化硅增透膜,探讨不同量的MTES对薄膜结构和性能的影响。研究发现随着MTES的增加,膜的孔径与抗冷凝性能均呈现出先增加后降低的趋势;同时,随着MTES的增加,涂层接触角逐渐增加;这表明与涂层表面的疏水性相比,涂层内部的孔结构大小与减反射涂层(ARcoatings)的抗冷凝性能相关性更大,当MTES与TEOS的摩尔比为1:2时,涂层达到最佳性能。 Using TEOS (ethyl silicate), MTES (methyltriethoxysilane) as a precursor, MTES (methyltriethoxysilane) as an organic modifier, Triton ~ X-100 as a templating agent, The acid-catalyzed sol-gel process was used to prepare porous silica antireflection coatings, and the effects of different amounts of MTES on the structure and properties of the films were investigated. It was found that with the increase of MTES, both the pore size and the anti-condensation ability of the films tended to increase at first and then decrease. At the same time, the contact angles of the films gradually increased with the increase of MTES. This indicated that compared with the hydrophobicity of the coating surface , The size of the pore structure inside the coating is more relevant to the anti-condensation performance of ARcoatings, and the coating achieves the best performance when the molar ratio of MTES to TEOS is 1: 2.
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