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研究了大面积金刚石膜沉积过程中的均匀性问题和金刚石膜质量的均匀性问题．研究表明：用于生长金刚石膜的大面积磁旋转等离子体电弧是均匀的，能使气体混合均匀：金刚石膜在形核阶段是均匀的；金刚石膜在生长阶段是均匀的，有利于提高成膜几率：沉积后的金刚石膜的质量是均匀的．大面积磁控长通道等离子矩能生长均匀的金刚石膜，可用于金刚石膜的研究和工业生产，
The problem of uniformity in the deposition of large-area diamond films and the uniformity of diamond film quality were investigated. The results show that the large area of the rotating plasma arc used to grow the diamond film is uniform and the gas is uniformly mixed: the diamond film is uniform during the nucleation stage; the diamond film is uniform during the growth stage, which is beneficial to improve the film formation Probability: The quality of the deposited diamond film is uniform. A large area of plasma magnetron long-time plasma moment can grow uniform diamond film can be used for diamond film research and industrial production,