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日本电子公司生产的JEOL1000kV电子显微镜具有原子尺度的分辨率,称为ARM显微镜。这种显微镜的点分辨率为0.18nm,可观察到一般的金属、陶瓷、电子材料的原子图象。美国国家电子显微镜中心的劳伦斯伯克利实验室购置了一台这种显微镜。该仪器的高压发生器采用Cockroft-Walton系统,用高压氟利昂绝缘,稳定性高于1×10~(-6)/min。真空系统用两个溅射泵、铁吸附泵和涡轮分子泵,维持真空度为10~(-6)Pa。LaB_6电子枪保证在1000kV和25μA的条件下得到10~7A/cm~2/str的高亮度。在300000倍下曝光
JEOL1000kV electron microscope produced by Japanese electronics company has atomic scale resolution, called ARM microscope. The dot resolution of this microscope is 0.18 nm and atomic images of metals, ceramics, and electronic materials are observed. One such microscope was acquired by Lawrence Berkeley Lab at the National Center for Electron Microscopy. The instrument’s high-voltage generator using Cockroft-Walton system, with high-pressure freon insulation, stability is higher than 1 × 10 -6 / min. The vacuum system uses two sputter pumps, iron sorption pumps and turbomolecular pumps to maintain a vacuum of 10 -6 Pa. The LaB_6 electron gun guarantees a high brightness of 10-7A / cm ~ 2 / str at 1000kV and 25μA. Exposure at 300000 times