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DX—3型扫描电镜是中国科学院北京科仪厂生产的国内第一批扫描电镜,它的试制成功,在当时填补了国内空白,满足了国内许多科研及厂矿单位的急需。我所使用的DX—3型扫描电镜,是该厂第一批产品之一,从1976年9月安装到1982年5月调出,总计使用了近6年时间,观察了约8000个样品,拍摄了2万4千张照片,为我所的科研工作做出了巨大的贡献。现把该机发生的故障统计如下:见表1.目的是探讨扫描电镜的整机可靠性,为当前尚在使用该型号仪器的单位及生产厂家提供有益的信息。
DX-3 Scanning Electron Microscope is the first batch of scanning electron microscope produced by Beijing Branch Instrument Factory of Chinese Academy of Sciences. Its trial production succeeded and filled the domestic blank at that time, thus meeting the urgent need of many domestic research institutes and factories and mines units. The DX-3 SEM that I used was one of the first products of the factory. It was installed from September 1976 to May 1982 and spent a total of nearly 6 years. About 8,000 samples were observed, Photographed 24,000 photos, for my research work has made a significant contribution. The machine is now the fault statistics are as follows: See Table 1. The purpose is to explore the reliability of the whole machine by scanning electron microscopy, for the current unit is still using the type of equipment and manufacturers to provide useful information.