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意大利SGS 公司在美国亚利桑那州建成一个半导体厂,总面积达300000呎~2,其中22000呎~2 是一级超净厂房.工厂的初级产品是制造0.7μm 线宽的CMOS 集成电路.一级超净厂房是以0.3μm 颗粒定义的.即每立方英尺空间最多只能含1颗以下0.3μm 的微粒.为保证如此高的洁净度,空气的换气次数高达600次/小时.断面的层流风速达90呎/分,采用0.12μm、99.995%的高效过滤器.工厂包括有一个去离子水站,利用电渗析、反渗透和超细过滤单元,去离子水以600加仑/分在工艺线中循环流动。去离子水的容量是400加仑/分,近5000呎kynar 管(一种高纯氟聚合物)作为工厂的主管道.传统上,半导体的工艺用气体是采用不锈钢管和铜管传送,去离子水系统中是采用PVC管,而由赞城pennwalt 公司生产的kynar 管巳被用于去离子水和工艺用气体及液体的传送中.
Italy SGS built a semiconductor plant in Arizona, USA, with a total area of 300,000 feet to 2, of which 22,000 feet to 2 is a clean factory. The primary products of the factory is to manufacture 0.7μm line width CMOS integrated circuits. The net plant is defined as 0.3 μm particles, which means that there is a maximum of 0.3 μm particles per cubic foot of space. To ensure this high degree of cleanliness, the number of air changes is as high as 600 times per hour. Speed 90 ft / min with high efficiency filters of 0.12μm, 99.995% The plant includes a deionized water station utilizing electrodialysis, reverse osmosis and ultrafiltration units with deionized water at 600 gallons / min in the process line Circulation flow. Deionized water has a capacity of 400 gallons per minute and nearly 5000 feet of kynar tubing, a high-purity fluoropolymer, is used as the main conduit for the plant. Traditionally, the process gas for semiconductors was delivered using stainless steel and copper tubing. Deionized The PVC pipe is used in the water system, while the kynar pipe manufactured by the Pennwalt company in Penang is used for the deionized water and process gases and liquids.