论文部分内容阅读
研制了一种以差压式半导体硅力敏传感器为压力检测元件的精密尺寸测量与控制仪器——GLQ型硅力敏式气动量仪。该仪器结构小巧,稳定可靠,线性范围宽,增益可调范围大,动态特性好,并兼有气,电双重优点,提高了仪器对不同测量对象的适应能力。实测表明,当采用喷嘴挡板式非接触气动测头时,仪表精度优于2%FS,示值稳定性误差小于1%FS,动态响应的稳定时间为0.1～0.2秒,比现有薄膜和波纹管式气动量仪减小3～5倍。为精密尺寸的气动测量与控制提供了一种新型的量仪。
Developed a kind of differential pressure type semiconductor silicon force sensor as the pressure detection element precision size measurement and control instruments - GLQ silicon force sensitive pneumatic measuring instrument. The instrument has the advantages of compact structure, stable and reliable, wide linear range, large adjustable gain range, good dynamic characteristics, dual advantages of gas and electricity, and improved adaptability of the instrument to different measurement objects. The measured results show that the accuracy of the instrument is better than 2% FS when the nozzle baffle non-contact pneumatic probe is used, the stability error of indication is less than 1% FS, the dynamic response time is 0.1 ~ 0.2 seconds, Bellows pneumatic instrument to reduce 3 to 5 times. It provides a new type of gauge for the precise size of the pneumatic measurement and control.